文章信息/Info

Title:

 Research Progress of Diamond Cutting Tools’ Development based on Focused Ion Beam (FIB)

作者:

 徐宗偉; 兀偉; 張少婧

 (天津大學(xué) 精密測試技術(shù)及儀器國家重點(diǎn)實(shí)驗(yàn)室 天津市微納制造技術(shù)工程中心，天津 300072)

Author(s):

 Zongwei Xu;  Wei Wu;  Shaojing Zhang

 (State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tianjin University, Tianjin 300072, China)

關(guān)鍵詞:

 ; 聚焦離子束; 先進(jìn)制造; 超精密加工; 刀具

DOI:

10.7502/j.issn.1674-3962.2013.12.06

文獻(xiàn)標(biāo)志碼:

A

摘要:

 本文概述了基于聚焦離子束（Focused Ion Beam，F(xiàn)IB）加工技術(shù)制備金剛石切削刀具的相關(guān)研究進(jìn)展。首先介紹了金剛石刀具的研究背景和制造現(xiàn)狀。針對金剛石刀具的刃口半徑、刃形精度等核心參數(shù)，研究者開展了聚焦離子束制造方法與工藝優(yōu)化研究，實(shí)現(xiàn)了刃口半徑為15~22 nm的金剛石刀具制造。隨后，從微觀切削基礎(chǔ)、微納光學(xué)元件制造兩個(gè)方面，就聚焦離子束制造金剛石刀具的應(yīng)用研究進(jìn)行了展開。最后從有效提高FIB制造效率、應(yīng)用研究拓展等角度，對該領(lǐng)域未來的發(fā)展進(jìn)行了展望。

Abstract:

The research progress of diamond cutting tools’ development based on Focused Ion Beam (FIB) processing technology was outlined in this paper. Firstly, the research background and manufacturing progress of diamond cutting tool was introduced. Aiming at the diamond tool core parameters of cutting edge radius, edge shape accuracy, the researchers carried out the FIB method and process optimization, which achieved the diamond tool with edge radius of 15 ~ 22 nm. Then, the applications on FIB-based diamond tools were presented from the two aspects of micro cutting mechanism and micro-nano optical component manufacturing. Finally, future developments in this field were discussed, including, how to effectively improve the FIB manufacturing efficiency and widen the application developments.