[1]李春光,王飛,安濤,等.添加劑元素對AZO薄膜性能的研究進(jìn)展[J].中國材料進(jìn)展,2013,(12):752-759.[doi:10.7502/j.issn.1674-3962.2013.12.07]
LI Chunguang,WANG Fei,*,et al.Research Progress of Additive Elements on the Properties of AZO Thin Films[J].MATERIALS CHINA,2013,(12):752-759.[doi:10.7502/j.issn.1674-3962.2013.12.07]
點(diǎn)擊復(fù)制
添加劑元素對AZO薄膜性能的研究進(jìn)展(
)
中國材料進(jìn)展[ISSN:1674-3962/CN:61-1473/TG]
- 卷:
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- 期數(shù):
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2013年第12期
- 頁碼:
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752-759
- 欄目:
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特約研究論文
- 出版日期:
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2013-12-31
文章信息/Info
- Title:
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Research Progress of Additive Elements on the Properties of AZO Thin Films
- 作者:
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李春光; 王飛; 安濤; 王東新
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西安理工大學(xué)自動(dòng)化與信息工程學(xué)院
- Author(s):
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- 關(guān)鍵詞:
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AZO薄膜; 添加劑元素; 光電性能; 薄膜性能
- DOI:
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10.7502/j.issn.1674-3962.2013.12.07
- 文獻(xiàn)標(biāo)志碼:
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A
- 摘要:
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近年來，國內(nèi)外一些研究者對添加劑元素與鋁元素共摻雜的ZnO薄膜開展了許多研究并發(fā)現(xiàn)在AZO薄膜摻入添加劑元素不僅會增強(qiáng)AZO薄膜的光電特性，而且還能優(yōu)化其晶體結(jié)構(gòu)和表面形貌，某些添加劑元素還可以提高AZO薄膜的多項(xiàng)性能和穩(wěn)定性，這對研究AZO薄膜性能的提高提供了一個(gè)更具潛力的研究方向。文中介紹了AZO薄膜的基本結(jié)構(gòu)、基本特性以及光電性能原理。重點(diǎn)對添加劑元素對AZO薄膜結(jié)構(gòu)的研究和光電性能的研究進(jìn)行了歸納和總結(jié)，并且對這些研究與AZO薄膜進(jìn)行了對比。綜述了添加劑元素?fù)饺氲腁ZO薄膜目前所報(bào)道的磁控濺射法、溶膠-凝膠法和脈沖激光法三種主要制備技術(shù)以及各自的優(yōu)缺點(diǎn)，同時(shí)對各方法制備的添加劑元素?fù)饺氲腁ZO薄膜的研究進(jìn)展進(jìn)行了闡述。最后介紹了添加劑元素?fù)饺氲腁ZO薄膜在光電領(lǐng)域的應(yīng)用，展望了其未來發(fā)展與研究趨勢。
- Abstract:
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In recent ye ars , some researchers ha ve carried out many studies on Al doped ZnO thin films with additive elements and found that the properties of AZO thin films with additive element s we re better than th ose of AZO thin films . The research achie v ements mentioned above were summarizedand thebasic structure and optoelectronic propertiesof AZO thin films were introduced in the paper. Thebasic structure and optoelectronic propertiesof AZO thin films with additive elements were described and compared with those of AZO thin films. The main preparation technology and advancement of additive elements doped AZO thin films were reported and the developments and the research trends of additive elements doped AZO thin films wereprospected.
更新日期/Last Update:
2014-03-20